还剩8页未读,继续阅读
本资源只提供10页预览,全部文档请下载后查看!喜欢就下载吧,查找使用更方便
文本内容:
中文3857字本科毕业设计(论文)外文翻译译文要求
1、外文翻译是毕业设计(论文)的主要内容之一,必须学生__完成
2、外文翻译译文内容应与学生的专业或毕业设计(论文)内容相关,不得少于15000印刷符号
3.外文翻译译文用A4纸打印文章标题用3号宋体,章节标题用4号宋体,正文用小4号宋体,20磅行距;页边距上、下、左、右均为
2.5cm,左侧装订,装订线
0.5cm按中文翻译在上,外文原文在下的顺序装订
4、年月日等的填写,用___数字书写,要符合《关于出版物上数字用法的试行规定》,如“2005年2月26日”
5、所有签名必须手写,不得打印简单紧凑的大步长线性压电步进电机QiWang1andQingyouLu12a1合肥微物质科学国家实验室,中国科学技术大学,安徽合肥230026,中华人民___2强磁场实验室,中国科学院,安徽合肥230031,中华人民___的中国
2009.
6.11接收;
2009.
7.16通过;
2009.
8.14网络出版我们提出一篇关于新型压电步进电机的文章,它具有高密度,刚性,简单,和任意方向可操作性的特点虽然测试在室温下进行,但是由于宽松的操作条件和大步长,该电机也能在低温下工作电机由一个压电扫描器管来运行,它的轴向几乎被切成两半,通过轴的弹簧部分夹持一个空心轴内部两端双驱动电压仅使压力管的两部分在一个方向上变形,且能反向__轴承以恢复原状,反之亦然©美国物理研究所[工业部:
10.1063/
1.3197381]1.简介扫描探针显微镜(SPM)在一些有重要类型的原子甚至是亚原子研究的纳米技术领域是一个功能强大的工具显微镜的一个关键组成部分,就是它那个能在纳米范围内粗略接近被测物的末端或者样品的定位器,这多半需要一个压电步进电机1-11压电电动机在其他领域也有重要应用,例如显微镜在现代光学12,细胞或者DNA控制中的定位13到现在为止,在尺蠖314-
19、甲虫类生物5-71020-
22、剪切压电步进电机289112324,惯性滑块425-28等文献中找到了各种各样的压电电动机然而,他们都有着严重的缺点对于前三种而言,每一种都需要三个或者更多的电压驱动才能__作,这使得电机的结构和控制都变得太过复杂在小领域(极端环境条件)或者微__测量等方面,他们的可靠性和应用程度成为了一个很大的问题惯性滑块虽然简单,但是特性不够硬(容易产生振动,从而降低了原子图像的品质),并且无法产生足够的推动力在这片文章中,我们阐述了一个不具有以上限制的压电电动机电机由一个压电扫描器管(PST)来运行,它的轴向几乎被切成两半,通过轴上的弹簧部分夹持一个空心管(HS)内部两端双驱动电压仅使压力管的两部分在一个方向上变形,且能反向__轴承以恢复原状,反之亦然其紧凑,简单,刚度,和大步长的特性使其在小空间(极端条件下)和低温应用中非常有用a__的__方式如下__86-551-360-0247____qxl@ustc.edu.cn__ilto:____qxl@ustc.edu.cn2.设计原理图1为我们设计的原理图图2为实物图两个
1.5mm厚的蓝色环粘(采用了来自环氧树脂技术的环氧树脂)在了
7.9mm内径、
10.2mm外径的压电扫描管(压电扫描管物理模型
130.24,长30mm,外径10mm,壁厚
0.5mm,有±200V的最大工作电压)的整个外环边缘处在压电扫描管的外径蓝色环上切两个相对的切口,长度从一段的蓝色环到另一端的蓝色环,总长大概占到整个压电扫描管的92%的长度为被切到的蓝色环是粘在基环上的,另外一个蓝色环被切成了两半,它被称作半夹持环(夹持一个可转动的空心管)没对没有被切割的相邻电极用导线连在了一起,形成两个半圆柱形电极,任意一个称为电极1(E1),为了方便,把另一个称为电极2(E2)由E1和E2控制的压电扫描管的两部分分别简称为P1,P2电机可__部分是一个钛合金空心管,它__入到压电扫描管的内部,如图1(a)所示我们还研究过圆形和方形的空心管,如图1(b)所示对于圆形空心管而言(长45mm,内径
5.8mm,外径
7.8mm,穿过蓝色环到达压电扫描管的边缘并形成一个
0.05mm的间隙),导线从与他垂直的平面的一段管过轴到另一端两个切割线不会穿过整个空心管,会在每端留下
0.8mm的未切割部分空心管切除部分的那对空隙朝同一方向打开,并且和压电扫描管上分布的缝隙是同一方向一个弹性很强的弹簧被牢固的固定在空心管的一端,推动空心管的打开,分别对夹持的半环施加N1和N2的推力,同时空心管另一端一个较弱的压缩弹簧让空心管给基换施加一个总的压力NbrN1,N2和Nbr在上述较强和较弱的压缩弹簧上能大致平衡因此,只要两者的摩擦系数相等,那么施加在空心管的最大静摩擦力会因为这三个压力的大致相等而抵消(方向可能与下面讨论的相反)图1(a)我们的压电电机的结构(b)两种空心管的研究这种在压电扫描管和空心管两段互相夹持的结构有一个很大的好处,就是这种结构很稳定(耐振动噪声),能在任意方向上__同时也应注意到,这种夹持结构是灵活的(大范围的力),这表明较大的温度变化不会引起夹持力显著的变化,且这三个最大静摩擦力任然可以保持平衡为了能控制电机,图3(a)所示的两个驱动电压D1和D2分别适用于压电扫描管的电极E1和E2(内部电极电压定为-200V),这能试相对的半圆形螺线管P1和P2变形,如下图所示在第一个1/6周期(T1)内,P1和P2初始化状态在T2内,P1保持不变,P2收缩这会导致P2和空心管的自由端的电压下降,而不是基环和空心环指间电压的下滑,因为P2到空心管的最大静摩擦力小于fr2小于P1到空心管与基环到空心管的最大静摩擦力之和,fr1+frbr(假设这些摩擦力远远小于P1和P2的阻力Fbl1和Fbl2)下一时间段,T3,P1和P2保持在之前的状态这种纯粹的“等待”是为下一步的同步做好准备,这不是必须的,可以去掉来节省时间在T4时间内,P1收缩,P2保持不变这会导致P1和空心管的自由端电压下降(与T2时间的动作原因一样)到现在为止,P1和P2都已经在基于基础环,没有__空心管的情况下从扩张的状态变到收缩的状态T5是另外一个等待时间,它也是可以去掉的在最后一个1/6周期(T6)内,P1和P2同时扩张这次仅在基础环和空心环之间的电压发生了下滑,因为frbrfr1+fr2,这意味着P1和P2同时拖动着空心管从基环扩张的方向上__了一步最后,P1和P2回到最初状态,空心环__了一步空心环也可以使用如图3(b)所示的驱动电压在相反的方向上__,原理是类似的图2压电电机的实物图除了上述讨论的原型空心管,我们也尝试了方形空心管(42mm长,
5.6mm宽,壁厚
0.7mm),它的壁从一段到另一端进行了线切割(切割长度35mm),与另一个切割线互相平行,组成了一个蛇形的结构,如图1(b)所示切割平面之间的距离是
0.8mm这种设计比圆形的设计相对以__面要好
(1)空心管在蓝环上的滑落就想溜冰鞋在冰上的滑行,允许更大的压力(更线性)却又不会有更多的阻力;
(2)阻力值更精确,更稳定;
(3)只需要一个压力弹簧,它在方形空心管的位置能满足最佳的工作条件fr1≈fr2≈frbr;
(4)方形空心管和蓝色环指间的最小空隙容易调整扭曲(较小的空隙容易形成较大的运行距离)图3(a)趋势空心管朝压电扫描管方向扩张的两个驱动电压(b)趋势空心管朝压电扫描管相反方向扩张的两个驱动电压显然的,夹持力N1,N2和Nbr在空心管运动时不是一直存在的,因此需要限制它的运动范围方形空心管的运动范围可以从下述方式获得在图4中,弹簧产生的理Fs,LB和LC分别代表从弹簧到基环,从弹簧到半圆形夹持环的距离,由杠杆原理可知LB·Fs=N1+N2·LC+LBLC·Fs=Nbr·LC+LB因为N1≈N2,我们要求N1+N2Nbr以使空心管运动,这就意味着LBLC这个条件应该满足因为如果LC=0,空心管不能运动,那么运动范围最终由0LCLB决定在我们的设计中,LC+LB≈30mm(压电扫描管的长度),我们期望方形空心管的最大位移小于15mm如果夹持弹簧链接到蓝色环(不是空心管),__范围上的这个问题的限制任然是可以解决的图4图示可得运动范围大小3.性能测试我们在室温下,在__方向(向上__和向下__)的极端条件下测试了电机的运行情况,包括它的步长,速度,工作频率[分别如图5(a)的原型空心管和图6(a)的方形空心管],工作电压[分别如图5(b)的原型空心管和图6(b)的方形空心管]圆形空心管的压力值设为N1≈N2≈Nbr≈
0.22N,这个值远远小于驱动压电P1和P2的阻力值(Fbl1~Fbl2~2N)最大步长是
12.9μm,测试条件是
0.3Hz向下滑的驱动频率带动的圆形空心管当__方向变为向上的时候,步长因为重力变为
11.7μm如果是方形空心管,向下的步长和向上的步长分别是
8.9μm和
8.2μm,这个值更为合适,因为他的切割边缘与蓝色环相接所有这些步长值都比其他类似大小的压电电机91123的步长要大电机的转速当然和驱动频率很接近我们设置的最大驱动频率是50Hz,圆形空心管(向上运行对向下运行)和方形空心管(向上运行对向下运行)的转速分别是(
22.27对
24.62)(
19.44对
19.8)mm/min当驱动频率上升或者工作电压值下降的时候,步长的下降情况如图5和图6所示虽然我们从圆形空心管中获得了较大的步长,但是我们更倾向于使用方形空心管,因为它的优点限制更少例如,方形空心管的运行范围是9mm(理论上),而圆形空心管的运行范围是
3.3mm(比方形的在理论上少了
6.6mm)方形空心管电机的运行曲线如图6所示,比圆形空心管电机的曲线更平滑更稳定虽然测试是在室温条件下进行的,但是电机在固化氮的温度下工作也有很大潜力,原因有两个大步长的特性可以应对热量下降带来的问题,保持运行的稳定;
(2)它的弹簧夹持结构可以让压力弹簧(~5mm长,劲度系数大约是286N/m)在从室温到固化氮的很大的温度范围变化下仅有微米级的下滑,确保必要的摩擦力关系的成立,|fr1|≈|fr2|≈|frbr|这种变化对于空心管和蓝色环之间的压力值的影响可以忽略不计方形空心管可以承受磨损和撕裂的问题,因为它的四个边缘可以被蓝色环固定为了测试它的耐久度,我们在±200V和50Hz的驱动电压下超过一千次的3mm的替换条件下操作电机,电机任然能正常工作磨损不严重当然,空心管外部可以加上耐磨金属材料进行更好的保护(如果需要的话)图5用圆形空心管测试的电机步长(左侧垂直轴)和速度(右侧垂直轴)(a)频率(最大工作电压=±200V)(b)最大工作电压(频率=20Hz)图6用圆形空心管测试的电机步长(左侧垂直轴)和速度(右侧垂直轴)(a)频率(最大工作电压=±200V)(b)最大工作电压(频率=20Hz)4.结束语我们呈现了一个强大的线性压电电动机,它拥有其他压电电动机不能同时具有的几个重要特性,包括大步长,小尺寸,刚性,结构简单,操作方便,温度范围大,易形成不精确的__公差等耐久度测试结果非常好在建设一个现代化的扫描探针显微镜中,所有这些性能都是非常需要的致谢这项工程得到了中国国家自然科学基金10627403号,中国国家强磁场设施计划和中国科学院自然科学基金YZ200846的资助原文A______compactandrigidpiezoelectricstepmotorwithlargestepsizeQiWang1andQingyouLu12a1HefeiNationalLaboratoryforPhysicalScien__satMicroscaleUniversityofScien__andTechnologyofChinaHefeiAnhui230026People’sRepublicofChina2High__gneticFieldLaboratoryChineseAcademyofScien__sHefeiAnhui230031People’sRepublicofChinaRe__ived11June2009;ac__pted16July2009;publishedonline14August2009Wepresentanovelpiezoelectricsteppermotorfeaturinghighcompactnessrigiditysimplicityandanydirectionoperability.Althoughtestedinroomtemperatureitisbelievedtoworkinlowtemperaturesowingtoitslooseoperationconditionsandlargestepsize.Themotorisimplementedwithapiezoelectricscannertubethatisaxiallycutintoalmosttwohalvesandclampholdsahollowshaftinsideatbothendsviathespringpartsoftheshaft.Twodrivingvoltagesthatsinglydeformthetwohalvesofthepiezotubeinonedirectionandrecoversimultaneouslywillmovetheshaftintheoppositedirectionandvi__versa.©2009AmericanInstituteofPhysics.DOI:
10.1063/
1.3197381I.INTRODUCTIONThescanningprobemicroscopeSPMisapowerfultoolinthefieldofnanotechnologywithsomeimportanttypesh__ingatomicorevensubatomicresolutions.OnekeycomponentofanSPMisitscoarseapproachpositionerwhichbringsthetipandsampleascloseasinnanometerrangeandis__nytimesapiezoelectricmotor.1–11Thepiezo-motorhasneverthelessotherimportantapplicationssuchasmirrorpositioninginmodernoptics12and__llorDNA__nipulations.13Uptonowthereare__nykindsofpiezomotorsfoundinliteraturesincludingInchworm314–19beetletype5–71020–22shearpiezostepper289112324andinertialslider425–28etc.Howevertheyallh__eseveredrawbacks.Forthefirstthreetypeseachneedsthreeormorepiezoelectricactuatorstooperatewhichistoocomplicatedinbothstructureandcontrol.Theirreliabilityandapplicationsin__allspa__extremeconditionenviro__entsandweaksignalmeasurementsallbecomesevereissues.Inertialsliderisrather______butnotveryrigidpronetovibrationthusdowngradingthequalityofatomici__gesandunabletoprodu__enoughpushingfor__.Inthispaperwedemonstrateapiezoelectricmotorthatdoesnoth__etheabovelimitations.ItisimplementedbyasinglepiezoelectricscannertubePSTthatisaxiallyanddeeplycutintoalmosttwohalvesandgripsahollowshaftHSinsidefrombothendsbythespringpartsoftheHS.TwodrivingvoltagesthatseparatelydeformthetwohalvesofthePSTinonedirectionandconcurrentlyrecoverwillmovetheHSonestepintheoppositedirectionandvi__versa.Itscompactnesssimplicityrigidityandlargestepsize__keitparticularlyusefulin__allspa__extremeconditionsandlowtemperatureapplications.II.DESIGNANDPRINCIPLEFigure1showsthesche__ticofourdesign.AphotooftheactualsetupisgiveninFig.
2.Twosapphireringsof
1.5mmthickby
7.9and
10.2mminnerversusouterdiametersaregluedwithH74FepoxyfromEpoxyTechnologyontotheendsofafour-quadrantPSTmodelPT
130.24ofPhysikInstrumente30mmlongby10mmouterdiameterby
0.5mmwallthicknesswith±200V__ximumoperatingvoltagesrespectively.Acutwithdiamondsawthroughtwooppositeboundariesofthequadrantsis__defromthesapphireringatoneendofthePSTintoabout92%ofthetubelengthtowardtheotherend.TheuncutsapphireringisthebaseringwhereastheotheriscutintotwosemiringswhicharecalledclampingsemiringswillclampholdamobileHS.Eachpairofthenei___oringelectrodeswithnocutinbetweeniswiredtogetherresultingintwosemicylindricalelectrodesoneisarbitrarilycalledthefirstelectrodeE1forconvenien__andtheotherthesecondelectrodeE
2.ThetwohalvesofthePSTthatE1andE2controlareabbreviatedasP1andP2respectively.ThemovingpartofthemotorisatitaniumHSthatisinsertedintothePSTasshowninFig.1a.Weh__estu___dacircularandasquareHSasillustratedinFig.1b.Forthecircularonelength=45mminnerdiameter=
5.8mmandouterdiameter=
7.8mmwhichcanpassthroughthesapphireringsatthePSTendswitha__allgapof
0.05mmawirecutthroughtheaxisis__defromeachendtowardtheotherendwiththecuttingplanesperpendiculartoeachother.ThetwocutsdonotgothroughtheentireHSanda__alllengthof
0.8mmre__insuncutateachend.ThepairoftheHScutslitsh__ingtheopeningtowardthesamedirectionasthatofthePSTslitsisarrangedinthesameplanewiththePSTslits.AstrongercompressionspringissecuredintheHSatoneendpushingtheHStoopenwiderandpressagainsttheclampingsemiringswithfor__sN1andN2respectivelywhereasaweakercompressionspringintheHSattheotherendpressestheHSonthebaseringwithatotalpressingfor__Nbr.Thethreepressingfor__sN1N2andNbraresetroughlyequalbytheabovestrongerandweakercompressionsprings.Accordinglythe__ximumstaticfrictionfor__sontheHSduetothesethreepressingfor__sareapproxi__telyequalinvaluedirections__ybeoppositeasdiscussedbelowifequalfrictioncoefficientsareassumed.FIG.
1.aThestructureofourpiezomotor;btwokindsofhollowshaftsstu___d.OnebigadvantageofthismutualclampingbetweenthePSTandHSatbothendsisthatthisstructureisveryfirmresistanttovibrationnoiseandcanbeinstalledinanydirection.Alsonotethattheclampingiselasticlongrangefor__simplyingthatlargetemperaturevariationswillnotchangetheclampingfor__ssignificantlyandthethree__ximumstaticfrictionsre__insequalinvalue.TooperatethemotortwodrivingvoltagesD1andD2ofFig.3atypeareappliedtotheelectrodesE1andE2ofthePSTrespectivelytheinnerelectrodevoltageisfixedat-200VwhichwilldeformthecorrespondingsemitubularactuatorsP1andP2asfollows.P1andP2areinitializedtoexpansionstatesduringthefirst1/6periodT
1.InT2P2shrinkswhileP1staysunchanged.ThisresultsinaslidingbetweenthefreeendofP2andHSratherthanaslidingbetweenthebaseringandHSbecausetheP2-to-HS__ximumstaticfrictionfr2is__allerthanthesumoftheP1-to-HSandbasering-to-HS__ximumstaticfrictionsfr1+frbrassumingthesefrictionsaremuch__allerthantheblockingfor__sFbl1andFbl2ofP1andP
2.NextinT3P1andP2bothstayinthepreviousstate.Thispurely“wait”stateisapreparationforgoodsynchronyinthenextactionwhichisnotne__ssaryandcanbedroppedtos__etime.InT4P1shrinkswhileP2staysunchanged.Thisindu__saslidingbetweenthefreeendofP1andHSythesimilarreasontotheT2action.UptonowbothP1andP2h__echangedthestatesfromexpansiontocontractionwithoutmovingtheHSwithreferen__tothebasering.T5isanotherwaitwhichisagaindiscardable.Inthelast1/6periodT6P1andP2bothexpandsimultaneously.ThistimetheslidinghappensonlybetweenthebaseringandHSbecausefrbrfr1+fr2meaningthatP1andP2togetherdragtheHStomoveonestepintheexpansiondirectionfromthebasering.FinallyP1andP2returntotheinitialstatesandtheHShasmovedonestep.Thissequen__canberepeatedtoachievealargetr__elrange.TheHScanalsomoveintheoppositedirectionusingthedrivingvoltagegiveninFig.3bandtheprincipleisverysimilar.FIG.
2.Thephotoofourpiezoelectricmotor.FIG.
3.aThetwodrivingvoltageswhichmovetheHSintheexpansiondirectionofthePST.bThetwodrivingvoltageswhichmovetheHSinthecontractiondirectionofthePST.ApartfromthecircularHSdescribedaboveweh__ealsotriedasquareHS42mmlongby
5.6mmwidewallthicknessis
0.7mmwhichiswirecutfromeachendtotheotherendcuttinglength=35mmwiththecuttingplanesparalleltoeachotherformingaserpentinestructureasexhibitedinFig.1b.Thedistan__betweenthecuttingplanesis
0.8mm.Thisdesignisbetterthanitscircularcounterpartinthefollowingaspects:1theslidingoftheHSonthesapphireringsislikei__skatingshoesslidingoni__allowingbiggerpressingfor__smorerigidwithoutincreasingthefrictions;2thefrictionsarebetterdefinedandmorestable;3onlyonecompressionspringisneededwhosepositioninthesquareHScanbeadjustedtomeettheopti__lworkingconditionoffr1≈fr2≈frbr;4the__allestgapbetweenthesquareHSandthesapphireringsiseasiertotweakbygrinding__allergapwillleadtoalargertr__elrange.FIG.
4.Thesche__ticdiagramforderivingtherangeofmotion.Apparentlytheclampingfor__sN1N2andNbrdonotre__inconstantwhentheHSmovesthuslimitingitsrangeofmotion.TherangeofmotionforthesquareHScanbederivedasfollows.ReferringtoFig.4inwhichFSisthefor__produ__dbythespringandLBandLCstandforthedistan__sfromthespringtothebaseringandtotheclampingsemiringsrespectivelytheleverlawleadsto:LB·FS=N1+N2·LC+LBandLC·FS=Nbr·LC+LB.BecauseN1=N2andweneedN1+N2NbrfortheHStowalkthismeansthatLBLCshouldbesatisfied.Sin__theHScannotmoveifLC=0therangeofmotionisfinallydeterminedby0LCLB.InourdesignLC+LB≈30mmthelengthofthePSTweexpectthat__ximumdispla__mentofthesquareHSislessthan15mm.ThisissueoflimitationontherangeofmotioncanneverthelessbesolvediftheclampingspringsareattachedtothesapphireringsnottotheHS.III.PERFOR__N__TESTWeh__etestedtheroomtemperatureperfor__n__ofthemotorintwoextremecasesofmovingdirectionsupwardanddownwardbymeasuringitsstepsizeandspeedasfunctionsofthefrequency[Figs.5aand6aforcircularandsquareHSrespectively]andoperatingvoltage[Figs.5band6bforcircularandsquareHSrespectively].Thepressingfor__sweresettoN1≈N2≈Nbr≈
0.22NforcircularHSwhicharemuch__allerthantheblockingfor__sFbl1~Fbl2~2Nofthedrivingpiezo-P1andP
2.The__ximumstepsizeis
12.9mwiththemeasurementconditionsbeing:circularHSdownwardsteppingwith
0.3Hzdrivingfrequency.Whenthemovingdirectionischangedtoupwardthestepsizebecomes
11.7mduetogr__ity.IncaseofsquareHSthedownwardandupwardstepsizesare
8.9and
8.2mrespectivelywhichismoreuniformbecauseofitsknifeedgecontactswiththesapphirerings.Allthesestepsizesareratherlargecomparedwithothertypesofpiezoelectricmotors91123withthesimilarsize.Thespeedofmotionisofcoursecloselyrelatedtothedrivingfrequency.The__ximumdrivingfrequencywesetwas50HzatwhichthespeedsforthecircularupwardversusdownwardandsquareupwardversusdownwardHSwere:
22.27versus
24.62and
19.44versus
19.98mm/min.Whenthedrivingfrequencyincreasesorifthe__gnitudeoftheoperatingvoltagedropsthestepsizediminishesasseeninFigs.5and
6.AlthoughwegetlargerstepsizefromcircularHSwestillpreferthesquareHSowingtoitsadvantageslistedearlier.Forinstan__thetr__elrangeusingthesquareHSis9mmasdesignedcomparedwith
3.3mmforthecircularHSworsethanthedesigned
6.6mmtr__elrange.Theperfor__n__curvesofthesquareHSmotorseeninFig.6arealso__ootherandmoreconsistentthanthoseFig.5ofthecircularHSmotor.FIG.
5.ThestepsizeleftverticalaxisndspeedrightverticalaxisofthemotorusingthecircularHSasfunctionsofafrequency__ximumoperatingvoltage=±200Vandb__ximumoperatingvoltagefrequency=20Hz.Althoughtestedinroomtemperaturethemotorhashighpotentialtoworkinliquidheliumtemperaturefortworeasons:1itslargestepsizecanaffordtopayforthether__lcontractionstillwithre__rkablestepsizere__iningtoprodu__amove;2itsspringclampingstructurevalidatestherequiredfrictionrelationship|fr1|≈|fr2|≈|frbr|inaverywidetemperaturerangesin__achangefromroomtemperaturetoliquidheliumonlyshrinksthecompressionsprings~5mmlongspringconstantisabout286N/mbymicronswhichdonotconsiderablyaffectthepressingfor__sbetweentheHSandthesapphirerings.ThesquareHS__ysufferwearandtearissuesasitsfouredgescouldbescratchedbythesapphirerings.Totestitsdurabilityweoperatedthemotorrepeatedlywith±200Vand50Hzdrivingvoltagesformorethanonethousandtimeswithadispla__mentabout3mmandthemotorstillworkedwell.Thewearwasnotsevere.OfcoursetheHScanbecoatedwithwearresistant__terialsforbetterprotectionifne__ssary.FIG.
6.ThestepsizeleftverticalaxisndspeedrightverticalaxisofthemotorusingthecircularHSasfunctionsofafrequency__ximumoperatingvoltage=±200Vandb__ximumoperatingvoltagefrequency=20Hz.IV.CONCLUSIONWeh__epresentedapowerfullinearpiezoelectricmotorthatownsseveralimportantfeaturesnotsimultaneouslyownedbyotherpiezomotorsincluding:largestepsize__allsizeveryrigid______instructureandoperationverylargetemperaturerangeeasyto__keandloose__chiningtoleran__etc.Itsdurabilityhasalsobeentestedwhichisrathergood.AllthesearehighlydesiredintheconstructionofamodernSPM.指导教师意见指导教师签字年月日系教研室意见主任签字年月日。